3/4/2011	10:03:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2011	10:03:10 AM	Recipe started at 10:03 AM
3/4/2011	10:03:10 AM	H2 valve closed
3/4/2011	10:03:10 AM	BCl3 valve closed
3/4/2011	10:03:10 AM	PH3 valve closed
3/4/2011	10:03:10 AM	SiCl4 pre valve closed
3/4/2011	10:03:10 AM	SiCl4 post valve closed
3/4/2011	10:03:10 AM	Main Vac valve closed
3/4/2011	10:03:10 AM	Bypass valve closed
3/4/2011	10:03:10 AM	Bubbler valve closed
3/4/2011	10:03:10 AM	Helium valve opened
3/4/2011	10:03:10 AM	Helium MFC set to  500.000000
3/4/2011	10:03:10 AM	H2 MFC set to  0.000000
3/4/2011	10:03:10 AM	BCl3 MFC set to  0.000000
3/4/2011	10:03:10 AM	PHl3 MFC set to  0.000000
3/4/2011	10:03:10 AM	SiCl4 MFC set to  0.000000
3/4/2011	10:03:10 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	10:03:10 AM	Tube furnace set to 0
3/4/2011	10:04:31 AM	Helium valve closed
3/4/2011	10:04:31 AM	H2 valve closed
3/4/2011	10:04:31 AM	BCl3 valve closed
3/4/2011	10:04:31 AM	PH3 valve closed
3/4/2011	10:04:31 AM	SiCl4 pre valve closed
3/4/2011	10:04:31 AM	SiCl4 post valve closed
3/4/2011	10:04:31 AM	Main Vac valve closed
3/4/2011	10:04:31 AM	Bypass valve closed
3/4/2011	10:04:31 AM	Bubbler valve closed
3/4/2011	10:04:31 AM	Helium MFC set to  0.000000
3/4/2011	10:04:31 AM	H2 MFC set to  0.000000
3/4/2011	10:04:31 AM	BCl3 MFC set to  0.000000
3/4/2011	10:04:31 AM	PHl3 MFC set to  0.000000
3/4/2011	10:04:31 AM	SiCl4 MFC set to  0.000000
3/4/2011	10:04:31 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	10:04:31 AM	Tube furnace set to 0
3/4/2011	10:04:31 AM	Run finished at 10:04 AM
3/4/2011	10:04:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2011	10:11:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	10:11:31 AM	Recipe started at 10:11 AM
3/4/2011	10:11:31 AM	Helium valve closed
3/4/2011	10:11:31 AM	H2 valve closed
3/4/2011	10:11:31 AM	BCl3 valve closed
3/4/2011	10:11:31 AM	PH3 valve closed
3/4/2011	10:11:31 AM	SiCl4 pre valve closed
3/4/2011	10:11:31 AM	SiCl4 post valve closed
3/4/2011	10:11:31 AM	Main Vac valve closed
3/4/2011	10:11:31 AM	Bubbler valve closed
3/4/2011	10:11:31 AM	Bypass valve opened
3/4/2011	10:11:31 AM	Helium MFC set to  0.000000
3/4/2011	10:11:31 AM	H2 MFC set to  0.000000
3/4/2011	10:11:31 AM	BCl3 MFC set to  0.000000
3/4/2011	10:11:31 AM	PHl3 MFC set to  0.000000
3/4/2011	10:11:31 AM	SiCl4 MFC set to  0.000000
3/4/2011	10:11:31 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	10:11:31 AM	Tube furnace set to 0
3/4/2011	10:12:02 AM	Helium valve closed
3/4/2011	10:12:02 AM	H2 valve closed
3/4/2011	10:12:02 AM	BCl3 valve closed
3/4/2011	10:12:02 AM	PH3 valve closed
3/4/2011	10:12:02 AM	SiCl4 pre valve closed
3/4/2011	10:12:02 AM	SiCl4 post valve closed
3/4/2011	10:12:02 AM	Bubbler valve closed
3/4/2011	10:12:02 AM	Main Vac valve opened
3/4/2011	10:12:02 AM	Bypass valve opened
3/4/2011	10:12:02 AM	Helium MFC set to  0.000000
3/4/2011	10:12:02 AM	H2 MFC set to  0.000000
3/4/2011	10:12:02 AM	BCl3 MFC set to  0.000000
3/4/2011	10:12:02 AM	PHl3 MFC set to  0.000000
3/4/2011	10:12:02 AM	SiCl4 MFC set to  0.000000
3/4/2011	10:12:02 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	10:12:02 AM	Tube furnace set to 0
3/4/2011	10:12:03 AM	Run finished at 10:12 AM
3/4/2011	10:12:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	10:12:09 AM	Helium MFC set to  20.000000
3/4/2011	10:12:19 AM	Helium valve opened
3/4/2011	10:38:55 AM	Helium valve closed
3/4/2011	10:39:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2011	10:39:01 AM	Recipe started at 10:39 AM
3/4/2011	10:39:01 AM	H2 valve closed
3/4/2011	10:39:01 AM	BCl3 valve closed
3/4/2011	10:39:01 AM	PH3 valve closed
3/4/2011	10:39:01 AM	SiCl4 pre valve closed
3/4/2011	10:39:01 AM	SiCl4 post valve closed
3/4/2011	10:39:01 AM	Main Vac valve closed
3/4/2011	10:39:01 AM	Bypass valve closed
3/4/2011	10:39:01 AM	Bubbler valve closed
3/4/2011	10:39:01 AM	Helium valve opened
3/4/2011	10:39:01 AM	Helium MFC set to  500.000000
3/4/2011	10:39:01 AM	H2 MFC set to  0.000000
3/4/2011	10:39:01 AM	BCl3 MFC set to  0.000000
3/4/2011	10:39:01 AM	PHl3 MFC set to  0.000000
3/4/2011	10:39:01 AM	SiCl4 MFC set to  0.000000
3/4/2011	10:39:01 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	10:39:01 AM	Tube furnace set to 0
3/4/2011	10:40:22 AM	Helium valve closed
3/4/2011	10:40:22 AM	H2 valve closed
3/4/2011	10:40:22 AM	BCl3 valve closed
3/4/2011	10:40:22 AM	PH3 valve closed
3/4/2011	10:40:22 AM	SiCl4 pre valve closed
3/4/2011	10:40:22 AM	SiCl4 post valve closed
3/4/2011	10:40:22 AM	Main Vac valve closed
3/4/2011	10:40:22 AM	Bypass valve closed
3/4/2011	10:40:22 AM	Bubbler valve closed
3/4/2011	10:40:22 AM	Helium MFC set to  0.000000
3/4/2011	10:40:22 AM	H2 MFC set to  0.000000
3/4/2011	10:40:22 AM	BCl3 MFC set to  0.000000
3/4/2011	10:40:22 AM	PHl3 MFC set to  0.000000
3/4/2011	10:40:22 AM	SiCl4 MFC set to  0.000000
3/4/2011	10:40:22 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	10:40:22 AM	Tube furnace set to 0
3/4/2011	10:40:22 AM	Run finished at 10:40 AM
3/4/2011	10:40:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2011	10:43:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	10:43:44 AM	Recipe started at 10:43 AM
3/4/2011	10:43:44 AM	Helium valve closed
3/4/2011	10:43:44 AM	H2 valve closed
3/4/2011	10:43:44 AM	BCl3 valve closed
3/4/2011	10:43:44 AM	PH3 valve closed
3/4/2011	10:43:44 AM	SiCl4 pre valve closed
3/4/2011	10:43:44 AM	SiCl4 post valve closed
3/4/2011	10:43:44 AM	Main Vac valve closed
3/4/2011	10:43:44 AM	Bubbler valve closed
3/4/2011	10:43:44 AM	Bypass valve opened
3/4/2011	10:43:44 AM	Helium MFC set to  0.000000
3/4/2011	10:43:44 AM	H2 MFC set to  0.000000
3/4/2011	10:43:44 AM	BCl3 MFC set to  0.000000
3/4/2011	10:43:44 AM	PHl3 MFC set to  0.000000
3/4/2011	10:43:44 AM	SiCl4 MFC set to  0.000000
3/4/2011	10:43:44 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	10:43:44 AM	Tube furnace set to 0
3/4/2011	10:44:15 AM	Helium valve closed
3/4/2011	10:44:15 AM	H2 valve closed
3/4/2011	10:44:15 AM	BCl3 valve closed
3/4/2011	10:44:15 AM	PH3 valve closed
3/4/2011	10:44:15 AM	SiCl4 pre valve closed
3/4/2011	10:44:15 AM	SiCl4 post valve closed
3/4/2011	10:44:15 AM	Bubbler valve closed
3/4/2011	10:44:15 AM	Main Vac valve opened
3/4/2011	10:44:15 AM	Bypass valve opened
3/4/2011	10:44:15 AM	Helium MFC set to  0.000000
3/4/2011	10:44:15 AM	H2 MFC set to  0.000000
3/4/2011	10:44:15 AM	BCl3 MFC set to  0.000000
3/4/2011	10:44:15 AM	PHl3 MFC set to  0.000000
3/4/2011	10:44:15 AM	SiCl4 MFC set to  0.000000
3/4/2011	10:44:15 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	10:44:15 AM	Tube furnace set to 0
3/4/2011	10:44:15 AM	Run finished at 10:44 AM
3/4/2011	10:44:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	10:45:36 AM	Helium MFC set to  20.000000
3/4/2011	10:45:37 AM	Helium valve opened
3/4/2011	11:05:39 AM	Helium valve closed
3/4/2011	11:06:44 AM	Helium valve opened
3/4/2011	11:10:25 AM	Helium valve closed
3/4/2011	11:11:18 AM	Recipe started at 11:11 AM
3/4/2011	11:11:18 AM	Helium valve closed
3/4/2011	11:11:18 AM	BCl3 valve closed
3/4/2011	11:11:18 AM	PH3 valve closed
3/4/2011	11:11:18 AM	SiCl4 pre valve closed
3/4/2011	11:11:18 AM	SiCl4 post valve closed
3/4/2011	11:11:18 AM	Main Vac valve closed
3/4/2011	11:11:18 AM	Bypass valve closed
3/4/2011	11:11:18 AM	Bubbler valve closed
3/4/2011	11:11:18 AM	H2 valve opened
3/4/2011	11:11:18 AM	Helium MFC set to  0.000000
3/4/2011	11:11:18 AM	H2 MFC set to  500.000000
3/4/2011	11:11:18 AM	BCl3 MFC set to  0.000000
3/4/2011	11:11:18 AM	PHl3 MFC set to  0.000000
3/4/2011	11:11:18 AM	SiCl4 MFC set to  0.000000
3/4/2011	11:11:18 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	11:11:18 AM	Tube furnace set to 0
3/4/2011	11:12:41 AM	Helium valve closed
3/4/2011	11:12:41 AM	BCl3 valve closed
3/4/2011	11:12:41 AM	PH3 valve closed
3/4/2011	11:12:41 AM	SiCl4 pre valve closed
3/4/2011	11:12:41 AM	SiCl4 post valve closed
3/4/2011	11:12:41 AM	Main Vac valve closed
3/4/2011	11:12:41 AM	Bypass valve closed
3/4/2011	11:12:41 AM	H2 valve opened
3/4/2011	11:12:41 AM	Bubbler valve opened
3/4/2011	11:12:41 AM	Helium MFC set to  0.000000
3/4/2011	11:12:41 AM	H2 MFC set to  500.000000
3/4/2011	11:12:41 AM	BCl3 MFC set to  0.000000
3/4/2011	11:12:41 AM	PHl3 MFC set to  0.000000
3/4/2011	11:12:41 AM	SiCl4 MFC set to  0.000000
3/4/2011	11:12:41 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	11:12:41 AM	Tube furnace set to 1000
3/4/2011	11:32:41 AM	Helium valve closed
3/4/2011	11:32:41 AM	BCl3 valve closed
3/4/2011	11:32:41 AM	PH3 valve closed
3/4/2011	11:32:41 AM	Main Vac valve closed
3/4/2011	11:32:41 AM	Bypass valve closed
3/4/2011	11:32:41 AM	H2 valve opened
3/4/2011	11:32:41 AM	SiCl4 pre valve opened
3/4/2011	11:32:41 AM	SiCl4 post valve opened
3/4/2011	11:32:41 AM	Bubbler valve opened
3/4/2011	11:32:41 AM	Helium MFC set to  0.000000
3/4/2011	11:32:41 AM	H2 MFC set to  500.000000
3/4/2011	11:32:41 AM	BCl3 MFC set to  0.000000
3/4/2011	11:32:41 AM	PHl3 MFC set to  0.000000
3/4/2011	11:32:41 AM	SiCl4 MFC set to  50.000000
3/4/2011	11:32:41 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	11:32:41 AM	Tube furnace set to 1000
3/4/2011	11:52:41 AM	H2 valve closed
3/4/2011	11:52:41 AM	BCl3 valve closed
3/4/2011	11:52:41 AM	PH3 valve closed
3/4/2011	11:52:41 AM	SiCl4 pre valve closed
3/4/2011	11:52:41 AM	SiCl4 post valve closed
3/4/2011	11:52:41 AM	Main Vac valve closed
3/4/2011	11:52:41 AM	Bypass valve closed
3/4/2011	11:52:41 AM	Helium valve opened
3/4/2011	11:52:41 AM	Bubbler valve opened
3/4/2011	11:52:41 AM	Helium MFC set to  500.000000
3/4/2011	11:52:41 AM	H2 MFC set to  0.000000
3/4/2011	11:52:41 AM	BCl3 MFC set to  0.000000
3/4/2011	11:52:41 AM	PHl3 MFC set to  0.000000
3/4/2011	11:52:41 AM	SiCl4 MFC set to  0.000000
3/4/2011	11:52:41 AM	Bypass solenoid MFC set to  0.000000
3/4/2011	11:52:41 AM	Tube furnace set to 0
3/4/2011	12:42:41 PM	H2 valve closed
3/4/2011	12:42:41 PM	BCl3 valve closed
3/4/2011	12:42:41 PM	PH3 valve closed
3/4/2011	12:42:41 PM	SiCl4 pre valve closed
3/4/2011	12:42:41 PM	SiCl4 post valve closed
3/4/2011	12:42:41 PM	Main Vac valve closed
3/4/2011	12:42:41 PM	Bypass valve closed
3/4/2011	12:42:41 PM	Helium valve opened
3/4/2011	12:42:41 PM	Bubbler valve opened
3/4/2011	12:42:41 PM	Helium MFC set to  500.000000
3/4/2011	12:42:41 PM	H2 MFC set to  0.000000
3/4/2011	12:42:41 PM	BCl3 MFC set to  0.000000
3/4/2011	12:42:41 PM	PHl3 MFC set to  0.000000
3/4/2011	12:42:41 PM	SiCl4 MFC set to  0.000000
3/4/2011	12:42:41 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	12:42:41 PM	Tube furnace set to 0
3/4/2011	12:50:14 PM	Helium valve closed
3/4/2011	12:50:14 PM	H2 valve closed
3/4/2011	12:50:14 PM	BCl3 valve closed
3/4/2011	12:50:14 PM	PH3 valve closed
3/4/2011	12:50:14 PM	SiCl4 pre valve closed
3/4/2011	12:50:14 PM	SiCl4 post valve closed
3/4/2011	12:50:14 PM	Main Vac valve closed
3/4/2011	12:50:14 PM	Bypass valve closed
3/4/2011	12:50:14 PM	Bubbler valve closed
3/4/2011	12:50:14 PM	Helium MFC set to  0.000000
3/4/2011	12:50:14 PM	H2 MFC set to  0.000000
3/4/2011	12:50:14 PM	BCl3 MFC set to  0.000000
3/4/2011	12:50:14 PM	PHl3 MFC set to  0.000000
3/4/2011	12:50:14 PM	SiCl4 MFC set to  0.000000
3/4/2011	12:50:14 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	12:50:14 PM	Tube furnace set to 0
3/4/2011	12:50:14 PM	Run finished at 12:50 PM
3/4/2011	12:54:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	12:54:56 PM	Recipe started at 12:54 PM
3/4/2011	12:54:56 PM	Helium valve closed
3/4/2011	12:54:56 PM	H2 valve closed
3/4/2011	12:54:56 PM	BCl3 valve closed
3/4/2011	12:54:56 PM	PH3 valve closed
3/4/2011	12:54:56 PM	SiCl4 pre valve closed
3/4/2011	12:54:56 PM	SiCl4 post valve closed
3/4/2011	12:54:56 PM	Main Vac valve closed
3/4/2011	12:54:56 PM	Bubbler valve closed
3/4/2011	12:54:56 PM	Bypass valve opened
3/4/2011	12:54:56 PM	Helium MFC set to  0.000000
3/4/2011	12:54:56 PM	H2 MFC set to  0.000000
3/4/2011	12:54:56 PM	BCl3 MFC set to  0.000000
3/4/2011	12:54:56 PM	PHl3 MFC set to  0.000000
3/4/2011	12:54:56 PM	SiCl4 MFC set to  0.000000
3/4/2011	12:54:56 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	12:54:56 PM	Tube furnace set to 0
3/4/2011	12:55:28 PM	Helium valve closed
3/4/2011	12:55:28 PM	H2 valve closed
3/4/2011	12:55:28 PM	BCl3 valve closed
3/4/2011	12:55:28 PM	PH3 valve closed
3/4/2011	12:55:28 PM	SiCl4 pre valve closed
3/4/2011	12:55:28 PM	SiCl4 post valve closed
3/4/2011	12:55:28 PM	Bubbler valve closed
3/4/2011	12:55:28 PM	Main Vac valve opened
3/4/2011	12:55:28 PM	Bypass valve opened
3/4/2011	12:55:28 PM	Helium MFC set to  0.000000
3/4/2011	12:55:28 PM	H2 MFC set to  0.000000
3/4/2011	12:55:28 PM	BCl3 MFC set to  0.000000
3/4/2011	12:55:28 PM	PHl3 MFC set to  0.000000
3/4/2011	12:55:28 PM	SiCl4 MFC set to  0.000000
3/4/2011	12:55:28 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	12:55:29 PM	Tube furnace set to 0
3/4/2011	12:55:29 PM	Run finished at 12:55 PM
3/4/2011	12:55:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	12:55:36 PM	Helium MFC set to  15.000000
3/4/2011	12:55:37 PM	Helium valve opened
3/4/2011	1:51:59 PM	Helium valve closed
3/4/2011	1:52:36 PM	Recipe started at 1:52 PM
3/4/2011	1:52:36 PM	Helium valve closed
3/4/2011	1:52:36 PM	BCl3 valve closed
3/4/2011	1:52:36 PM	PH3 valve closed
3/4/2011	1:52:36 PM	SiCl4 pre valve closed
3/4/2011	1:52:36 PM	SiCl4 post valve closed
3/4/2011	1:52:36 PM	Main Vac valve closed
3/4/2011	1:52:36 PM	Bypass valve closed
3/4/2011	1:52:36 PM	Bubbler valve closed
3/4/2011	1:52:36 PM	H2 valve opened
3/4/2011	1:52:36 PM	Helium MFC set to  0.000000
3/4/2011	1:52:36 PM	H2 MFC set to  500.000000
3/4/2011	1:52:36 PM	BCl3 MFC set to  0.000000
3/4/2011	1:52:36 PM	PHl3 MFC set to  0.000000
3/4/2011	1:52:36 PM	SiCl4 MFC set to  0.000000
3/4/2011	1:52:36 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	1:52:36 PM	Tube furnace set to 0
3/4/2011	1:53:58 PM	Helium valve closed
3/4/2011	1:53:58 PM	BCl3 valve closed
3/4/2011	1:53:58 PM	PH3 valve closed
3/4/2011	1:53:58 PM	SiCl4 pre valve closed
3/4/2011	1:53:58 PM	SiCl4 post valve closed
3/4/2011	1:53:58 PM	Main Vac valve closed
3/4/2011	1:53:58 PM	Bypass valve closed
3/4/2011	1:53:58 PM	H2 valve opened
3/4/2011	1:53:58 PM	Bubbler valve opened
3/4/2011	1:53:58 PM	Helium MFC set to  0.000000
3/4/2011	1:53:58 PM	H2 MFC set to  500.000000
3/4/2011	1:53:58 PM	BCl3 MFC set to  0.000000
3/4/2011	1:53:58 PM	PHl3 MFC set to  0.000000
3/4/2011	1:53:58 PM	SiCl4 MFC set to  0.000000
3/4/2011	1:53:58 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	1:53:58 PM	Tube furnace set to 1000
3/4/2011	2:13:58 PM	Helium valve closed
3/4/2011	2:13:58 PM	BCl3 valve closed
3/4/2011	2:13:58 PM	PH3 valve closed
3/4/2011	2:13:58 PM	Main Vac valve closed
3/4/2011	2:13:58 PM	Bypass valve closed
3/4/2011	2:13:58 PM	H2 valve opened
3/4/2011	2:13:58 PM	SiCl4 pre valve opened
3/4/2011	2:13:58 PM	SiCl4 post valve opened
3/4/2011	2:13:58 PM	Bubbler valve opened
3/4/2011	2:13:58 PM	Helium MFC set to  0.000000
3/4/2011	2:13:58 PM	H2 MFC set to  500.000000
3/4/2011	2:13:58 PM	BCl3 MFC set to  0.000000
3/4/2011	2:13:58 PM	PHl3 MFC set to  0.000000
3/4/2011	2:13:58 PM	SiCl4 MFC set to  50.000000
3/4/2011	2:13:58 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	2:13:58 PM	Tube furnace set to 1000
3/4/2011	2:33:58 PM	H2 valve closed
3/4/2011	2:33:58 PM	BCl3 valve closed
3/4/2011	2:33:58 PM	PH3 valve closed
3/4/2011	2:33:58 PM	SiCl4 pre valve closed
3/4/2011	2:33:58 PM	SiCl4 post valve closed
3/4/2011	2:33:58 PM	Main Vac valve closed
3/4/2011	2:33:58 PM	Bypass valve closed
3/4/2011	2:33:58 PM	Helium valve opened
3/4/2011	2:33:58 PM	Bubbler valve opened
3/4/2011	2:33:58 PM	Helium MFC set to  500.000000
3/4/2011	2:33:58 PM	H2 MFC set to  0.000000
3/4/2011	2:33:58 PM	BCl3 MFC set to  0.000000
3/4/2011	2:33:58 PM	PHl3 MFC set to  0.000000
3/4/2011	2:33:58 PM	SiCl4 MFC set to  0.000000
3/4/2011	2:33:58 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	2:33:59 PM	Tube furnace set to 0
3/4/2011	3:21:02 PM	H2 valve closed
3/4/2011	3:21:02 PM	BCl3 valve closed
3/4/2011	3:21:02 PM	PH3 valve closed
3/4/2011	3:21:02 PM	SiCl4 pre valve closed
3/4/2011	3:21:02 PM	SiCl4 post valve closed
3/4/2011	3:21:02 PM	Main Vac valve closed
3/4/2011	3:21:02 PM	Bypass valve closed
3/4/2011	3:21:02 PM	Helium valve opened
3/4/2011	3:21:02 PM	Bubbler valve opened
3/4/2011	3:21:02 PM	Helium MFC set to  500.000000
3/4/2011	3:21:02 PM	H2 MFC set to  0.000000
3/4/2011	3:21:02 PM	BCl3 MFC set to  0.000000
3/4/2011	3:21:02 PM	PHl3 MFC set to  0.000000
3/4/2011	3:21:02 PM	SiCl4 MFC set to  0.000000
3/4/2011	3:21:02 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	3:21:02 PM	Tube furnace set to 0
3/4/2011	3:21:04 PM	Helium valve closed
3/4/2011	3:21:04 PM	H2 valve closed
3/4/2011	3:21:04 PM	BCl3 valve closed
3/4/2011	3:21:04 PM	PH3 valve closed
3/4/2011	3:21:04 PM	SiCl4 pre valve closed
3/4/2011	3:21:04 PM	SiCl4 post valve closed
3/4/2011	3:21:04 PM	Main Vac valve closed
3/4/2011	3:21:04 PM	Bypass valve closed
3/4/2011	3:21:04 PM	Bubbler valve closed
3/4/2011	3:21:04 PM	Helium MFC set to  0.000000
3/4/2011	3:21:04 PM	H2 MFC set to  0.000000
3/4/2011	3:21:04 PM	BCl3 MFC set to  0.000000
3/4/2011	3:21:04 PM	PHl3 MFC set to  0.000000
3/4/2011	3:21:04 PM	SiCl4 MFC set to  0.000000
3/4/2011	3:21:04 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	3:21:04 PM	Tube furnace set to 0
3/4/2011	3:21:04 PM	Run finished at 3:21 PM
3/4/2011	3:26:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	3:26:40 PM	Recipe started at 3:26 PM
3/4/2011	3:26:40 PM	Helium valve closed
3/4/2011	3:26:40 PM	H2 valve closed
3/4/2011	3:26:40 PM	BCl3 valve closed
3/4/2011	3:26:40 PM	PH3 valve closed
3/4/2011	3:26:40 PM	SiCl4 pre valve closed
3/4/2011	3:26:40 PM	SiCl4 post valve closed
3/4/2011	3:26:40 PM	Main Vac valve closed
3/4/2011	3:26:40 PM	Bubbler valve closed
3/4/2011	3:26:40 PM	Bypass valve opened
3/4/2011	3:26:40 PM	Helium MFC set to  0.000000
3/4/2011	3:26:40 PM	H2 MFC set to  0.000000
3/4/2011	3:26:40 PM	BCl3 MFC set to  0.000000
3/4/2011	3:26:40 PM	PHl3 MFC set to  0.000000
3/4/2011	3:26:40 PM	SiCl4 MFC set to  0.000000
3/4/2011	3:26:40 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	3:26:40 PM	Tube furnace set to 0
3/4/2011	3:27:12 PM	Helium valve closed
3/4/2011	3:27:12 PM	H2 valve closed
3/4/2011	3:27:12 PM	BCl3 valve closed
3/4/2011	3:27:12 PM	PH3 valve closed
3/4/2011	3:27:12 PM	SiCl4 pre valve closed
3/4/2011	3:27:12 PM	SiCl4 post valve closed
3/4/2011	3:27:12 PM	Bubbler valve closed
3/4/2011	3:27:12 PM	Main Vac valve opened
3/4/2011	3:27:12 PM	Bypass valve opened
3/4/2011	3:27:12 PM	Helium MFC set to  0.000000
3/4/2011	3:27:12 PM	H2 MFC set to  0.000000
3/4/2011	3:27:12 PM	BCl3 MFC set to  0.000000
3/4/2011	3:27:12 PM	PHl3 MFC set to  0.000000
3/4/2011	3:27:12 PM	SiCl4 MFC set to  0.000000
3/4/2011	3:27:12 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	3:27:13 PM	Tube furnace set to 0
3/4/2011	3:27:13 PM	Run finished at 3:27 PM
3/4/2011	3:27:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	3:27:23 PM	Helium MFC set to  20.000000
3/4/2011	3:27:24 PM	Helium valve opened
3/4/2011	3:27:24 PM	Helium valve closed
3/4/2011	3:27:25 PM	Helium valve opened
3/4/2011	3:52:45 PM	Helium valve closed
3/4/2011	3:54:06 PM	Helium MFC set to  50.000000
3/4/2011	3:54:07 PM	Helium valve opened
3/4/2011	3:54:35 PM	Helium valve closed
3/4/2011	3:55:25 PM	Helium valve opened
3/4/2011	3:56:32 PM	Helium valve closed
3/4/2011	3:57:33 PM	Recipe started at 3:57 PM
3/4/2011	3:57:33 PM	Helium valve closed
3/4/2011	3:57:33 PM	BCl3 valve closed
3/4/2011	3:57:33 PM	PH3 valve closed
3/4/2011	3:57:33 PM	SiCl4 pre valve closed
3/4/2011	3:57:33 PM	SiCl4 post valve closed
3/4/2011	3:57:33 PM	Main Vac valve closed
3/4/2011	3:57:33 PM	Bypass valve closed
3/4/2011	3:57:33 PM	Bubbler valve closed
3/4/2011	3:57:33 PM	H2 valve opened
3/4/2011	3:57:33 PM	Helium MFC set to  0.000000
3/4/2011	3:57:33 PM	H2 MFC set to  500.000000
3/4/2011	3:57:33 PM	BCl3 MFC set to  0.000000
3/4/2011	3:57:33 PM	PHl3 MFC set to  0.000000
3/4/2011	3:57:33 PM	SiCl4 MFC set to  0.000000
3/4/2011	3:57:33 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	3:57:34 PM	Tube furnace set to 0
3/4/2011	3:58:55 PM	Helium valve closed
3/4/2011	3:58:55 PM	BCl3 valve closed
3/4/2011	3:58:55 PM	PH3 valve closed
3/4/2011	3:58:55 PM	SiCl4 pre valve closed
3/4/2011	3:58:55 PM	SiCl4 post valve closed
3/4/2011	3:58:55 PM	Main Vac valve closed
3/4/2011	3:58:55 PM	Bypass valve closed
3/4/2011	3:58:55 PM	H2 valve opened
3/4/2011	3:58:55 PM	Bubbler valve opened
3/4/2011	3:58:55 PM	Helium MFC set to  0.000000
3/4/2011	3:58:55 PM	H2 MFC set to  500.000000
3/4/2011	3:58:55 PM	BCl3 MFC set to  0.000000
3/4/2011	3:58:55 PM	PHl3 MFC set to  0.000000
3/4/2011	3:58:55 PM	SiCl4 MFC set to  0.000000
3/4/2011	3:58:55 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	3:58:55 PM	Tube furnace set to 1000
3/4/2011	4:18:55 PM	Helium valve closed
3/4/2011	4:18:55 PM	BCl3 valve closed
3/4/2011	4:18:55 PM	PH3 valve closed
3/4/2011	4:18:55 PM	Main Vac valve closed
3/4/2011	4:18:55 PM	Bypass valve closed
3/4/2011	4:18:55 PM	H2 valve opened
3/4/2011	4:18:55 PM	SiCl4 pre valve opened
3/4/2011	4:18:55 PM	SiCl4 post valve opened
3/4/2011	4:18:55 PM	Bubbler valve opened
3/4/2011	4:18:55 PM	Helium MFC set to  0.000000
3/4/2011	4:18:55 PM	H2 MFC set to  500.000000
3/4/2011	4:18:55 PM	BCl3 MFC set to  0.000000
3/4/2011	4:18:55 PM	PHl3 MFC set to  0.000000
3/4/2011	4:18:55 PM	SiCl4 MFC set to  50.000000
3/4/2011	4:18:55 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	4:18:55 PM	Tube furnace set to 1000
3/4/2011	4:38:55 PM	H2 valve closed
3/4/2011	4:38:55 PM	BCl3 valve closed
3/4/2011	4:38:55 PM	PH3 valve closed
3/4/2011	4:38:55 PM	SiCl4 pre valve closed
3/4/2011	4:38:55 PM	SiCl4 post valve closed
3/4/2011	4:38:55 PM	Main Vac valve closed
3/4/2011	4:38:55 PM	Bypass valve closed
3/4/2011	4:38:55 PM	Helium valve opened
3/4/2011	4:38:55 PM	Bubbler valve opened
3/4/2011	4:38:55 PM	Helium MFC set to  500.000000
3/4/2011	4:38:55 PM	H2 MFC set to  0.000000
3/4/2011	4:38:55 PM	BCl3 MFC set to  0.000000
3/4/2011	4:38:55 PM	PHl3 MFC set to  0.000000
3/4/2011	4:38:55 PM	SiCl4 MFC set to  0.000000
3/4/2011	4:38:55 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	4:38:55 PM	Tube furnace set to 0
3/4/2011	5:28:55 PM	H2 valve closed
3/4/2011	5:28:55 PM	BCl3 valve closed
3/4/2011	5:28:55 PM	PH3 valve closed
3/4/2011	5:28:55 PM	SiCl4 pre valve closed
3/4/2011	5:28:55 PM	SiCl4 post valve closed
3/4/2011	5:28:55 PM	Main Vac valve closed
3/4/2011	5:28:55 PM	Bypass valve closed
3/4/2011	5:28:55 PM	Helium valve opened
3/4/2011	5:28:55 PM	Bubbler valve opened
3/4/2011	5:28:55 PM	Helium MFC set to  500.000000
3/4/2011	5:28:55 PM	H2 MFC set to  0.000000
3/4/2011	5:28:55 PM	BCl3 MFC set to  0.000000
3/4/2011	5:28:55 PM	PHl3 MFC set to  0.000000
3/4/2011	5:28:55 PM	SiCl4 MFC set to  0.000000
3/4/2011	5:28:55 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	5:28:55 PM	Tube furnace set to 0
3/4/2011	5:32:31 PM	Helium valve closed
3/4/2011	5:32:31 PM	H2 valve closed
3/4/2011	5:32:31 PM	BCl3 valve closed
3/4/2011	5:32:31 PM	PH3 valve closed
3/4/2011	5:32:31 PM	SiCl4 pre valve closed
3/4/2011	5:32:31 PM	SiCl4 post valve closed
3/4/2011	5:32:31 PM	Main Vac valve closed
3/4/2011	5:32:31 PM	Bypass valve closed
3/4/2011	5:32:31 PM	Bubbler valve closed
3/4/2011	5:32:31 PM	Helium MFC set to  0.000000
3/4/2011	5:32:31 PM	H2 MFC set to  0.000000
3/4/2011	5:32:31 PM	BCl3 MFC set to  0.000000
3/4/2011	5:32:31 PM	PHl3 MFC set to  0.000000
3/4/2011	5:32:31 PM	SiCl4 MFC set to  0.000000
3/4/2011	5:32:31 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	5:32:31 PM	Tube furnace set to 0
3/4/2011	5:32:31 PM	Run finished at 5:32 PM
3/4/2011	5:36:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	5:36:57 PM	Recipe started at 5:36 PM
3/4/2011	5:36:57 PM	Helium valve closed
3/4/2011	5:36:57 PM	H2 valve closed
3/4/2011	5:36:57 PM	BCl3 valve closed
3/4/2011	5:36:57 PM	PH3 valve closed
3/4/2011	5:36:57 PM	SiCl4 pre valve closed
3/4/2011	5:36:57 PM	SiCl4 post valve closed
3/4/2011	5:36:57 PM	Main Vac valve closed
3/4/2011	5:36:57 PM	Bubbler valve closed
3/4/2011	5:36:57 PM	Bypass valve opened
3/4/2011	5:36:57 PM	Helium MFC set to  0.000000
3/4/2011	5:36:57 PM	H2 MFC set to  0.000000
3/4/2011	5:36:57 PM	BCl3 MFC set to  0.000000
3/4/2011	5:36:57 PM	PHl3 MFC set to  0.000000
3/4/2011	5:36:57 PM	SiCl4 MFC set to  0.000000
3/4/2011	5:36:57 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	5:36:57 PM	Tube furnace set to 0
3/4/2011	5:37:30 PM	Helium valve closed
3/4/2011	5:37:30 PM	H2 valve closed
3/4/2011	5:37:30 PM	BCl3 valve closed
3/4/2011	5:37:30 PM	PH3 valve closed
3/4/2011	5:37:30 PM	SiCl4 pre valve closed
3/4/2011	5:37:30 PM	SiCl4 post valve closed
3/4/2011	5:37:30 PM	Bubbler valve closed
3/4/2011	5:37:30 PM	Main Vac valve opened
3/4/2011	5:37:30 PM	Bypass valve opened
3/4/2011	5:37:30 PM	Helium MFC set to  0.000000
3/4/2011	5:37:30 PM	H2 MFC set to  0.000000
3/4/2011	5:37:30 PM	BCl3 MFC set to  0.000000
3/4/2011	5:37:30 PM	PHl3 MFC set to  0.000000
3/4/2011	5:37:30 PM	SiCl4 MFC set to  0.000000
3/4/2011	5:37:30 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	5:37:30 PM	Tube furnace set to 0
3/4/2011	5:37:30 PM	Run finished at 5:37 PM
3/4/2011	5:37:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	5:37:36 PM	Helium MFC set to  15.000000
3/4/2011	5:37:46 PM	Helium valve opened
3/4/2011	7:04:42 PM	Helium valve closed
3/4/2011	7:04:47 PM	Helium MFC set to  7.000000
3/4/2011	7:04:48 PM	Helium valve opened
3/4/2011	7:05:01 PM	Helium valve closed
3/4/2011	7:05:05 PM	Helium MFC set to  10.000000
3/4/2011	7:05:05 PM	Helium valve opened
3/4/2011	7:30:29 PM	Helium valve closed
3/4/2011	7:30:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2011	7:30:31 PM	Recipe started at 7:30 PM
3/4/2011	7:30:31 PM	H2 valve closed
3/4/2011	7:30:31 PM	BCl3 valve closed
3/4/2011	7:30:31 PM	PH3 valve closed
3/4/2011	7:30:31 PM	SiCl4 pre valve closed
3/4/2011	7:30:31 PM	SiCl4 post valve closed
3/4/2011	7:30:31 PM	Main Vac valve closed
3/4/2011	7:30:31 PM	Bypass valve closed
3/4/2011	7:30:31 PM	Bubbler valve closed
3/4/2011	7:30:31 PM	Helium valve opened
3/4/2011	7:30:31 PM	Helium MFC set to  500.000000
3/4/2011	7:30:31 PM	H2 MFC set to  0.000000
3/4/2011	7:30:31 PM	BCl3 MFC set to  0.000000
3/4/2011	7:30:31 PM	PHl3 MFC set to  0.000000
3/4/2011	7:30:31 PM	SiCl4 MFC set to  0.000000
3/4/2011	7:30:31 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	7:30:31 PM	Tube furnace set to 0
3/4/2011	7:31:51 PM	Helium valve closed
3/4/2011	7:31:51 PM	H2 valve closed
3/4/2011	7:31:51 PM	BCl3 valve closed
3/4/2011	7:31:51 PM	PH3 valve closed
3/4/2011	7:31:51 PM	SiCl4 pre valve closed
3/4/2011	7:31:51 PM	SiCl4 post valve closed
3/4/2011	7:31:51 PM	Main Vac valve closed
3/4/2011	7:31:51 PM	Bypass valve closed
3/4/2011	7:31:51 PM	Bubbler valve closed
3/4/2011	7:31:51 PM	Helium MFC set to  0.000000
3/4/2011	7:31:51 PM	H2 MFC set to  0.000000
3/4/2011	7:31:51 PM	BCl3 MFC set to  0.000000
3/4/2011	7:31:51 PM	PHl3 MFC set to  0.000000
3/4/2011	7:31:51 PM	SiCl4 MFC set to  0.000000
3/4/2011	7:31:51 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	7:31:51 PM	Tube furnace set to 0
3/4/2011	7:31:52 PM	Run finished at 7:31 PM
3/4/2011	7:31:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2011	7:33:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2011	7:33:03 PM	Recipe started at 7:33 PM
3/4/2011	7:33:03 PM	Helium valve closed
3/4/2011	7:33:03 PM	H2 valve closed
3/4/2011	7:33:03 PM	BCl3 valve closed
3/4/2011	7:33:03 PM	PH3 valve closed
3/4/2011	7:33:03 PM	SiCl4 pre valve closed
3/4/2011	7:33:03 PM	SiCl4 post valve closed
3/4/2011	7:33:03 PM	Main Vac valve closed
3/4/2011	7:33:03 PM	Bubbler valve closed
3/4/2011	7:33:03 PM	Bypass valve opened
3/4/2011	7:33:03 PM	Helium MFC set to  0.000000
3/4/2011	7:33:03 PM	H2 MFC set to  0.000000
3/4/2011	7:33:03 PM	BCl3 MFC set to  0.000000
3/4/2011	7:33:03 PM	PHl3 MFC set to  0.000000
3/4/2011	7:33:03 PM	SiCl4 MFC set to  0.000000
3/4/2011	7:33:03 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	7:33:03 PM	Tube furnace set to 0
3/4/2011	7:33:33 PM	Helium valve closed
3/4/2011	7:33:33 PM	H2 valve closed
3/4/2011	7:33:33 PM	BCl3 valve closed
3/4/2011	7:33:33 PM	PH3 valve closed
3/4/2011	7:33:33 PM	SiCl4 pre valve closed
3/4/2011	7:33:33 PM	SiCl4 post valve closed
3/4/2011	7:33:33 PM	Bubbler valve closed
3/4/2011	7:33:33 PM	Main Vac valve opened
3/4/2011	7:33:33 PM	Bypass valve opened
3/4/2011	7:33:33 PM	Helium MFC set to  0.000000
3/4/2011	7:33:33 PM	H2 MFC set to  0.000000
3/4/2011	7:33:33 PM	BCl3 MFC set to  0.000000
3/4/2011	7:33:33 PM	PHl3 MFC set to  0.000000
3/4/2011	7:33:33 PM	SiCl4 MFC set to  0.000000
3/4/2011	7:33:33 PM	Bypass solenoid MFC set to  0.000000
3/4/2011	7:33:33 PM	Tube furnace set to 0
3/4/2011	7:33:34 PM	Run finished at 7:33 PM
3/4/2011	7:33:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
